EFEM Sota "TYK2102-2"
It is a wafer automatic transfer device that transfers wafers to process and detection modules via a robot in a clean environment.
Equipped with a high-performance AC servo motor, it achieves high-speed transport with a generous load capacity. It allows for optimal placement of robots, load ports, and hands. It inherits over 20 years of robot technology operating in harsh environments. 【Features】 ■ Capable of mounting 1 or 2 aligners, enabling high throughput ■ Various variations and custom options available ■ Compatible with both 200mm and 300mm *For more details, please refer to the PDF document or feel free to contact us.
- 企業：PHT
- 価格：Other
